UVTech Systems Inc.
UVTech has developed and patented a cleaning technology and system using laser radiation and gas for integrated circuit manufacturing.
UVTech has focused on the development of an environmentally sound photoreactive cleaning process using oxygen, ozone, and laser light. We have developed and sold several Beta systems for use in integrated circuit manufacturing, replacing wet processes that use large volumes of water and toxic chemicals. The XLC-100 laser cleaning system, first installed at Intel, is a small footprint, reliable tool, replacing 2-3 existing wet clean tools.